To provide: a sterilization method of a sterile water supply pipe interior of a sterilization filling machine that reliably sterilizes a sterile water supply pipe interior for supplying sterile water sprayed into each chamber to each chamber thereof, and an interior of a sterile water spray nozzle for spraying sterile water into each chamber, when a chamber interior of the sterilization filling machine is subjected to a COP treatment as well as a SOP treatment; and a sterilization apparatus thereof.SOLUTION: According to a sterilization filling machine for filling a sterilized content in a sterilized container to seal the container in which the content is filled, which is provided with a chamber for shielding the sterilization filling machine for every constituent portion, a sterilant is made to flow to a sterile water supply pipe for supplying sterile water into a chamber.SELECTED DRAWING: Figure 1

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