PROBLEM TO BE SOLVED: To provide a gas barrier vapor deposition film having excellent gas barrier properties and high retort properties and to provide a laminate and a packaging material using the same.SOLUTION: There is provided a gas barrier vapor deposition film 1 which comprises a substrate layer 2 composed of a resin film, an inorganic oxide vapor deposition film layer 3 containing aluminum oxide as a main component and a barrier coating layer 4, wherein the inorganic oxide vapor deposition film layer is distributed with a substance represented by Al2O4H, the maximum strength ratio Al2O4H/Al2O3 in the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) of an inorganic oxide vapor deposition film layer obtained by etching a barrier coating layer and an inorganic oxide vapor deposition film layer using TOF-SIMS is 0.20 or more and 0.65 or less, the barrier coating film is adjacently laminated on the surface opposite to the...

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