A sterilization system may include an ozone generator, a buffer chamber, an ozone concentration monitor or cuvette, a treatment chamber, one or more valves, and a controller. The ozone generator generates a flow of ozone. The buffer chamber stores the flow of ozone. The ozone cuvette monitors a concentration of ozone from the buffer chamber. The treatment chamber receives a material for sterilization, and receives a flow of air/ozone. The controller selectively and independently controls each of the valves. The sterilization system including first and second operating modes. In the first operating mode, the treatment chamber is isolated from the ozone generator and the buffer chamber such that ozone is not being supplied to the treatment chamber. In the second operating mode, the treatment chamber is in communication with the ozone generator and the buffer chamber such that ozone is being supplied to the treatment chamber.

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