FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

To provide a film deposition apparatus that prevents a deposited barrier layer (functional layer) from being flawed.SOLUTION: There is provided a film deposition apparatus that forms a thin film on a surface of a base material, and that comprises: a conveyance part 11 which can convey the base material both forward and backward; a functional film deposition part 15 which forms a functional film v1 on the base material being conveyed forward or backward by the conveyance part 11; a protective film deposition part 16 which is provided downstream from the functional film deposition part 15 in the forward direction, and forms a protective film b1 for protecting the functional film v1 on the base material being conveyed forward or backward by the conveyance part 11; and a control part 17 which performs control to carry out forward conveyance and backward conveyance alternately so as to satisfy a> beta to...